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Pemasok yang Diaudit Bottom Sputtering High Vacuum Magnetron Sputtering Coater for Sputtering Semiconductor Material
MAGNETRON SPUTTERING: OVERVIEW
Sputtering is a plasma based deposition process in which energetic ions are accelerated towards a target. The ions strike the target and atoms are ejected (or sputtered) from the surface. These atoms travel towards the substrate and incorporate into the growing film.
Single target DC magnetron sputtering coater equipment is a cost-effective magnetron sputtering coating equipment independently researched and developed by our company. It has the characteristics of standardization, modularization and customization. Magnetron targets can be selected from 1 inch, 2 inches and 3 inches, and customers can choose according to the size of the plated substrate; The power supply is a 1500W high-power DC power supply, which can be used for high-energy metal sputtering coating. According to experimental requirements, DC or RF power supplies of other specifications can also be selected to achieve coating operations of various materials.
Specifications of magnetron sputtering coater:
| Product Name | Magnetron Sputtering Coater | |
| Model | TN-MSZ245-I-DC-SS | |
| Sample Stage | Size | φ100mm |
| Heating Temperature | <500ºC | |
| Rotary Speed | 0~20rpm, adjustable | |
| Sputtering Gun | 2 inch*1, 50.8mm, thickness<3mm | |
| Vacuum Chamber | Size | φ245*300mm |
| Observation Window | Quartz | |
| Chamber Material | SUS304 | |
| Opening | Top-open | |
| Vacuum System | Backup Pump | Rotary vane vacuum pump, 1.1L/s |
| Secondary Pump | Molecular Pump, 60L/S | |
| Vacuum Measurement | Composite vacuum gauge,Range:10-5~105Pa | |
| Sucking Port | KF16, KF40 | |
| Exhaust Port | KF16 | |
| Vacuum Degree | 1.0×10-4Pa | |
| Voltage | AC 220V 50/60Hz | |
| Sputtering Power | Quantity | DC Power Supply*1 |
| Output power | 300W | |
| Others | Voltage | AC220V,50Hz |
| Total Power | 2kW | |
| Overall Size | 550*350*400mm | |
1. WE have magnetron sputtering coater with 1 target, 2 targets, 3 targets, 4 targets, etc. Target can be designed at the top or bottom of the chamber.
2. 0-1000W DC power or RF power target is available. Bias function is optional.
3. Target size: 1-inch, 2-inch, 3-inch, 4-inch, etc.
4. Strong magnetic target and Permanent magnetic target is optional.
5. Magnetron sputtering coater with evaporation, E-beam is available.
6. Customized service is always available!
Zhengzhou Tainuo Film Materials Co., Ltd. is a comprehensive company integrating design, research and development, production and sales.
Our company's main products are: spin coater, thermal evaporation coater, magnetron sputter coater, plasma sputter coater, E-beam evaporation coater, PLD pulse laser coating machine, plasma cleaner, CVD system, PECVD system, diamond wire cutting machine, melting furnace/stove, arc melting furnace, etc.
Our products are widely used in the field of materials science research. We have extensive cooperation with domestic universities, laboratories, and new material companies. It has been successfully exported to more than 20 countries and regions including the United States, the United Kingdom, Germany, Russia, Switzerland, Canada, Brazil, etc. and have established long-term cooperative relationships with local dealers.
If you are conducting materials research, please contact us and we will provide you with customized services to make your research experiments smoother!
WE can ship the magnetron sputtering coater by land, by sea, by air, by express, also can arrange package and shipment according to your requirements.
Q. Are you manufacturer or trading company?
A. We are professional manufacturer of laboratory instruments, We have professional R&D team and workshop, which can promise the qulaity and after-sale service.
Q. How's your warranty?
A. Our warranty is 12 months, and provide lifetime maintenance. We provide 24 hours on-line service.
Q. How long is your delivery time? If I want to customize the instrument, how long does it take?
A. 5-10 days----in store. Customzied products---It usually takes 30-60 days depending on your requirements.
Q. Power supply and plug?
A. We can provide products accroding to your local voltage and plug standard.
Q. How to pay?
A. T T, L / C, D / P, etc.
Q. How is the package of goods? Delivery methods?
A. Standard export fumigation sign wooden box packaging or as your requirements.
IS MAGNETRON SPUTTERING THE RIGHT PROCESS FOR YOUR WORK?
Please get in touch and we can collaborate on your project.
How can we help you achieve your goals? What technical obstacles can our engineering team help you overcome? Please press the 'Get in Touch' button to get in contact with us, we'd be excited to hear about your research and help you in any way we can.
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