CAS No: | 75-73-0 |
---|---|
Rumus: | CF4 |
EINECS: | 200-896-5 |
Konstituen: | Industrial Pure Air |
Standar nilai: | Kelas Industri |
Bahan kimia: | Gas tidak mudah terbakar |
Pemasok dengan izin usaha terverifikasi
Item | Indeks | ||
CF4, %(V/V)≥ | 99.999 | 99.995 | 99.99 |
N2, 10-6(V/V) ≤ | 4 | 20 | 40 |
O2, 10-6(V/V) ≤ | 1 | 5 | 10 |
CO2, 10-6(V/V) ≤ | 1 | 5 | 10 |
CO, 10-6(V/V) ≤ | 0.3 | 0.5 | 1 |
SF6, 10-6(V/V) ≤ | 1 | 1 | 5 |
H2O, 10-6(V/V) ≤ | 1 | 5 | 10 |
HF, 10-6(V/V) ≤ | 0.1 | 0.3 | 0.3 |
TFC(CH2F2,CHF3,C2F3,C3F8),10-6(V/V) ≤ | 1 | 10 | 30 |
Total Konten pengotor, ppm (V/V) ≤ | 10 | 50 | 100 |
Parameter Assay Kritis |
Satuan | Perusahaan Anda Spesifikasi |
Analisis Hasil |
Metode Analisis |
Tetrahoromethane (CF4) | %(v/v) | 99.999% mnt | >99.999% | SISTEM |
Oksigen(O2) | v.ppm | <1.0 | <0.2 | SISTEM |
Nitrogen(N2) | v.ppm | <1.0 | <0.6 | SISTEM |
Karbon monoksida(CO) | v.ppm | <0.5 | <0.2 | SISTEM |
Karbon dioksida (CO2) | v.ppm | <0.5 | <0.2 | SISTEM |
Hexlaf sulfur (SF6) | v.ppm | <0.2 | <0.1 | SISTEM |
Trifluoromethane(CHF3) | v.ppm | <0.5 | <0.1 | SISTEM |
Miokarbon (OFC)* lainnya | v.ppm | <1.0 | <0.7 | SISTEM |
Total Hydrocarbon(THC)* | v.ppm | <0.5 | <0.1 | SISTEM |
Kelembapan (H2O) | v.ppm | <0.5 | <0.2 | Penganalisis Kelembapan |
Keasaman(seperti HF) | v.ppm | <0.1 | <0.08 | Penganalisis keasaman |
Kandungan najis | v.ppm | ≤10.0 | <10.0 | SISTEM |
Bersama(>0.1μm) | pcs/liter | <10.0 | <1.0 | ICP-MS |
Pemasok dengan izin usaha terverifikasi