CAS No.: | 7783-82-6 |
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Formula: | Wf6 |
EINECS: | 232-029-1 |
Constituent: | Industrial Pure Air |
Grade Standard: | Electronic Grade |
Chemical Property: | Poisonous Gases |
Pemasok dengan izin usaha terverifikasi
Menguji item | Satuan | Persyaratan kualitas | Hasil pengujian |
CF4 | ppm | <0.5 | <0.01 |
O2 | ppm | <0.5 | <0.01 |
N2 | ppm | <1 | 0.03 |
CO | ppm | <0.5 | <0.02 |
CO2 | ppm | <0.5 | <0.01 |
SiF4 | ppm | <0.5 | <0.1 |
ppm | <0.5 | <0.1 | |
HF | ppm | <5 | 0.19 |
Al | ppb | ≤10 | <0.020 |
AS | ppb | ≤10 | <0.001 |
B | ppb | ≤10 | <0.005 |
CA | ppb | ≤5 | <0.200 |
CD | ppb | ≤2 | <0.001 |
CR | ppb | ≤10 | <0.020 |
FE | ppb | ≤10 | <0.007 |
K | ppb | ≤5 | <0.100 |
MN | ppb | ≤10 | <0.001 |
Tidak tersedia | ppb | ≤5 | <0.040 |
Th | ppb | ≤0.1 | <0.001 |
TI | ppb | ≤10 | <0.002 |
Li | ppb | ≤10 | <0.002 |
U | ppb | ≤0.05 | <0.001 |
ZN | ppb | ≤10 | <0.005 |
Si | ppb | ≤10 | <0.100 |
Pb | ppb | ≤10 | <0.001 |
P | ppb | ≤2 | <0.300 |
Mg | ppb | ≤10 | <0.020 |
NI | ppb | ≤20 | <0.030 |
CU | ppb | ≤5 | <0.005 |
MO | ppb | ≤10 | <0.001 |
Pengotor total dari logam lain | ppb | ≤500 | <0.0010 |
Pemasok dengan izin usaha terverifikasi